document: Controls help harmonic spray do OK removing residues Looks at how innovative wafer-cleaning equipment hit the market in a timely fashion thanks in part to controls maker Rockwell Automation
doc_bio_tags: O O B I O O O O O O O O O O O O O O O O O O O O O O O B I
extractive_keyphrases: harmonic spray rockwell automation
abstractive_keyphrases: residues removal wafer-cleaning equipment psi machine allen-bradley controllogix automation control platform motion control allen-bradley 1336 plus ii variable frequency ac drives