document: Novel approach to super-resolution pits readout We proposed a novel method to realize the readout of super-resolution pits by using a super-resolution reflective film to replace the reflective layer of the conventional ROM . At the same time , by using Sb as the super-resolution reflective layer and SiN as a dielectric layer , the super-resolution pits with diameters of 380 nm were read out by a setup whose laser wavelength is 632.8 nm and numerical aperture is 0.40 . In addition , the influence of the Sb thin film thickness on the readout signal was investigated , the results showed that the optimum Sb thin film thickness is 28 to 30 nm , and the maximum CNR is 38 to 40 dB
doc_bio_tags: O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O B I O O O O O O O O O O O O O B I O O O O O O O O O O B I I I O O B I O O O O O O O O O B I I I O B I I I O O O B I O O O O O
extractive_keyphrases: numerical aperture sb thin film thickness readout signal maximum cnr 380 nm 28 to 30 nm
abstractive_keyphrases: super-resolution pits readout super-resolution reflective film sb super-resolution reflective layer sin dielectric layer 632.8 nm sb-sin